Scientific Vacuum Systems LTD

Production Sputtering

SVS offers a wide range of sputtering equipment for production facilities.
The V2000 series are offered in the following sputtering configurations:
V2000
Side Sputter
V2400
Sputter down
V2600
Sputter up
V2800
Loadlock Inline sputter system
V2900

Large area Inline loadlock sputter system

Available Options

Each system is individually configured around the requirements of the end user.
The systems take advantage of the latest technology, with a wide range of available options:

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Wet/Dry 1st stage pumping (application dependent)
Turbo or Cryo pumps for high vacuum stages
DC (straight & pulsed), RF Sputtering and co-deposition
Substrate heating/cooling

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High accuracy multiple process gas-admittance system
Ion assisted deposition
Substrate etch & bias (RF/DC)
Wide range of substrate sizes from 3-inch wafers to 1 metre square panels

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Automated Loadlock entry systems
All systems are controlled by a PLC based Control System, via a built-in industrial PC or Human-Machine Interface (HMI)
Data logging of all major process parameters
All systems are clean room compatible.

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SCIENTIFIC VACUUM SYSTEMS LTD
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