Accessories

VPC3000 Valve and Pump Controller

The VPC3000 valve and pump controller provides full automation of the first and second stage vacuum pumps, valve sequencing and operating modes of a vacuum system, which can be configured for either diffusion, cryo or turbo molecular pumping.  A colour touch screen HMI with mimic panel is supplied as standard, showing all system parameters from valve to pump status to process chamber pressure and cryo-pump temperature. Full automatic regeneration control of the cryo pump is also provided.  Accessories included are three Pirani sensors for monitoring the roughing foreline and pumpline pressures and a relay box for the operation and control of all the vacuum valves.
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SCIENTIFIC VACUUM SYSTEMS LTD
© 2018, SVS

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