Scientific Vacuum Systems Limited
Electron Beam Evaporation
Like the V2000 series production sputtering systems, the e2000 production evaporators are individually configured around the end user's requirements.
The e2000 systems take advantage of the latest technology, with a wide range of available options for all your E Beam Evaporation system requirements.
Available Options
All systems are controlled by a PLC based Control System, via a built-in industrial PC or Human-Machine Interface (HMI).
Datalogging of all major process parameters.
Substrate heating (up to 650°C).
Available Options
Single or multi-hearth e-beam guns (single up to 200cc capacity).
Substrate fixturing systems include planetary & rotary motion.
Multi-boat thermal evaporation.
Available Options
Deposition rate monitors and control systems.
Substrate cleaning and Ion assisted deposition.
Reactive gas admission.
Cryo pumping or Turbopump & Polycold for fast pumpdown.
Electron Beam Evaporation System Experts
